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Manufacturer/company:

KUKA Deutschland GmbH

Zugspitzstrasse 140
Augsburg
Germany

Number of projects
6
Number of test pieces
7
Phone

-

Email

-

Website

-

Documents

No documents found

Test piece

Name of test piece/s KUKA KR 10 R1100-2
Description Weight: 59 kg; load: 10 kg; range: 1101 mm
Project number KU 2210-1359
Created on 05/27/2025
Valid until 04/28/2028
Test type Electrostatic behavior Dry-Cleanroom
Classfication
Electrostatic behavior Dry-Cleanroom

Electrostatic charging behavior
(SEMI E78-0222)

Electrostatic field

Electrostatic level

Test result

Year Node

Limit value
[V/cm]

Mean value
[V/cm]

Max. single value measured
[V/cm]

20337,75 nm

8.5

8

12

Limit value:

fulfilled