TESTED DEVICE®
Report No. | Manufacturer | Product Name | Subject of Test (Result) |
---|---|---|---|
AP 0505-326 | AP&S GmbH | Air Heating System type LSE | |
FE 0008-212 | Festo AG & Co. | Air bearing control unit ABC-4P-24, LR-SDE-6-24 | Outgassing (VOC) Particle emission (VDI 2083 part 9.1) (ISO Class 5) Particle emission (VDI 2083 part 9.1) (ISO Class 6) |
VA 1206-605 | VAT Vakuumventile AG | Atmospheric door 076-50x336 Prototype | Particle emission (VDI 2083 part 9.1) |
VA 1411-739 | VAT Vakuumventile AG | Atmospheric door ATM-Door 3D-746253_2D-756860 prototype | Particle emission (VDI 2083 part 9.1) (ISO Class 5) |
VA 1206-605 | VAT Vakuumventile AG | Atmospheric door L-VAT 07512-UA24 | Particle emission (VDI 2083 part 9.1) |
BA 2303-1405 | Barkey GmbH & Co. KG | Barkey S-line C&G manufacturing date: 2/8/2023 Charge number: 10693 | Particel emission (ISO 14644 part 14) (ISO Class 1) |
BA 2303-1405 | Barkey GmbH & Co. KG | Barkey plasmatherm C&G manufacturing date: 2/15/2023 Charge number: 00010339R2 | Particel emission (ISO 14644 part 14) (ISO Class 7) |
BA 2303-1405 | Barkey GmbH & Co. KG | Barkey warming center C&G manufacturing date: 2/7/2023 Charge number: 10692 | Particel emission (ISO 14644 part 14) (ISO Class 7) |
SC 1606-831 | J. Schmalz GmbH | Bell-shaped suction cup SAXM 60 ED-85 G1/4-AG (blue) Material code: Elastodur Material type: Elastomer | Particle emission (VDI 2083 part 9.1) (ISO Class 4) |
SC 1606-831 | J. Schmalz GmbH | Bellows suction cup (oval) SPOB1f 60x25 SI-55 G1/4-IG (green) Material code: Silicone SI Material type: Elastomer | Particle emission (VDI 2083 part 9.1) (ISO Class 3) |
SC 1606-831 | J. Schmalz GmbH | Bellows suction cup (round) FG 19 HT1-60 N047 (blue) Material code: HT1 Material type: Elastomer | Particle emission (VDI 2083 part 9.1) (ISO Class 1) |
SC 1606-831 | J. Schmalz GmbH | Bellows suction cup (round) FG 3 HT1-60 N055 (blue) Material code: HT1 Material type: Elastomer | Particle emission (VDI 2083 part 9.1) (ISO Class 4) |
SC 1606-831 | J. Schmalz GmbH | Bellows suction cup (round) FGA 14 SI-HD (white) Material code: Silicone SI-HD Material type: Elastomer | Particle emission (VDI 2083 part 9.1) (ISO Class 2) |
SC 1606-831 | J. Schmalz GmbH | Bellows suction cup (round) PFG 6 HT1-60 N004 (blue) Material code: HT1 Material type: Elastomer | Particle emission (VDI 2083 part 9.1) (ISO Class 1) |
SC 1606-831 | J. Schmalz GmbH | Bellows suction cup (round) SPB4f 30 SI-55 SC080 (green) Material code: Silicone SI Material type: Elastomer | Particle emission (VDI 2083 part 9.1) (ISO Class 3) |
AD 1811-1079 | Advantest Europe GmbH | Cooling system E2760 FAE 18kW 100920 74 kg Water | Particel emission (ISO 14644 part 14) (ISO Class 3) |
AD 1805-1043 | Advantest Europe GmbH | Cooling system E2760 FAE 36 kW Heat transfer medium: Water Weight: 95 kg | Particel emission (ISO 14644 part 14) (ISO Class 7) |
AD 1811-1079 | Advantest Europe GmbH | Cooling system E2760 FAE 36 kW 177299 95 kg Water | Particel emission (ISO 14644 part 14) (ISO Class 3) |
AD 1811-1079 | Advantest Europe GmbH | Cooling system E2760 FAE 36 kW 177301 95 kg Water | Particel emission (ISO 14644 part 14) (ISO Class 3) |
AD 1805-1043 | Advantest Europe GmbH | Cooling system E2760 FCS Heat transfer medium: Water Weight: 247 kg | Particel emission (ISO 14644 part 14) (ISO Class 6) |
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (78 Hits)
- ISO Class 1 (10 Hits)
- ISO Class 2 or better (14 Hits)
- ISO Class 3 or better (22 Hits)
- ISO Class 4 or better (34 Hits)
- ISO Class 5 or better (44 Hits)
- ISO Class 6 or better (59 Hits)
- ISO Class 7 or better (65 Hits)
- ISO Class 8 or better (65 Hits)
- ISO Class 9 or better (65 Hits)
Subject Of Test
- All (78 Hits)
- Chemical resistance (VDI 2083 part 17) (1 Hits)
- Cleanability (VDI 2083 part 17) (1 Hits)
- Contamination residues (2 Hits)
- EDX analysis (1 Hits)
- ESD behaviour (DIN EN 61340-5-1) (4 Hits)
- Expertise (5 Hits)
- Isolation factor (1 Hits)
- Outgassing (Inorganic) (1 Hits)
- Outgassing (VDI 2083 part 17) (4 Hits)
- Outgassing (VOC) (2 Hits)
- Particel emission (ISO 14644 part 14) (28 Hits)
- Particle emission (VDI 2083 part 9.1) (39 Hits)
- Particle per wafer and pass (PWP) (1 Hits)
- Particles (airborne) (1 Hits)
- Raman analysis (1 Hits)
Categories
- All (1496 Hits)
- Cleanroom Facilities (534 Hits)
- Automation Components (282 Hits)
- Working Place and Operator (147 Hits)
- Materials (207 Hits)
- Process Equipment (78 Hits)
- Services (10 Hits)
- Energy Supply (238 Hits)